Comps Cleanroom Equip
Copy Masks

If a master mask is used, then the cost of the replacement mask or duplicate would be the same as making a new mask. However, if the dimensions are large enough (>2μm) and the specifications for resolution, registration, and defectivity are less critical, then a copy of the mask can be made using a contact print process. This is less costly than making a new master mask.

  • Primarily for contact aligner use
  • For volume applications (multiple copies)
  • For less critical requirements (feature size, defectivity & registration)
  • A submaster is created from which to make the copies
  • The submaster is created as a mirror image of the desired orientation of the final copy plate(s)
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