NOVAFAB® Fine Grain Copper

Award-winning advanced electroplating process producing a unique, ultra-pure, copper film for hybrid bonding applications.

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Product Overview

The award-winning NOVAFAB Fine Grain Copper electroplating process produces a unique film that supports the mechanical and electrical requirements of advanced semiconductor packaging. Engineered for various wafer-level packaging applications, NOVAFAB Fine Grain Copper excels in hybrid bonding.

The technology maintains a stable grain structure throughout production and demonstrates controlled grain-growth at post-processing temperatures, ensuring excellent bonding at the interface. This system enables high-quality and high-reliability interconnects for Die-to-Die (D2D), Die-to-Wafer (D2W) and Wafer-to-Wafer (W2W) bonding.

Product Features

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Improved Device Performance and Reliability

NOVAFAB Fine Grain Copper produces a high-density, ultra-pure deposit that minimizes signal degradation, improving overall device performance and reliability.

Stable Grain Structure for Defect-Free Bonding

Grain size is maintained through processing and controlled grain growth during annealing, ensuring the formation of defect-free bonds, significantly enhancing quality and reliability.

Adaptable Copper Deposit for Small Features

With a <0.2μm grain size, the copper deposit is adaptable for small features, making it ideal for applications requiring high-density interconnects with advanced mechanical and electrical demands.

Featured Applications

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Hybrid Bonding

NOVAFAB Fine Grain Copper excels in hybrid bonding. The technology maintains a stable grain structure throughout production and demonstrates controlled grain-growth at post-processing temperatures.

D2D, D2W and W2W Bonding

This system enables high-quality and high-reliability interconnects for Die-to-Die (D2D), Die-to-Wafer (D2W) and Wafer-to-Wafer (W2W) bonding.

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Product Documentation

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